PWS Semiconductor / Analog IV Tester Specifications
SMU CARD ELECTRICAL SPECIFICATIONS
The information and "typical" entries in the following specifications are not warrented, but provide useful information about the functions and performances of PWS SMU Cards.
|
Parameter |
Set Range |
Step Size |
Meas Resolution |
Comments |
|
| SMU 1-3 | |||||
|
VForce Mode |
VOUT |
+/- 10V |
312.5mV |
||
|
IMEAS |
100mA,10mA,1mA 100uA,10uA,1uA, 100nA,10nA Full Scale Range (F.S.R.) |
0.1% F.S.R. with 20 pA minimum |
Range is selectable or can be auto-ranged |
||
|
ILIM |
100mA,1mA, 10uA,100nA Full Scale Range (F.S.R.) |
0.1% F.S.R. | |||
|
IForce Mode |
IOUT |
100mA,10mA,1mA, 100uA,10uA,1uA, 100nA,10nA Full Scale Range (F.S.R.) |
0.05% F.S.R. |
Range is selectable or can be auto-ranged |
|
|
VMEAS |
+/- 10V, +/- 1V (F.S.R.) |
0.01% F.S.R |
Range is auto-selected |
||
|
VLIM |
+/- 10V (F.S.R.) |
1% F.S.R | |||
|
SMU 4 |
|||||
|
VForce Mode |
VOUT |
+/- 100V |
3.2mV |
||
|
IMEAS |
100mA,10mA,1mA, 100uA,10uA,1uA, 100nA,10nA Full Scale Range (F.S.R.) |
0.1% F.S.R. with 20 pA minimum |
Range is selectable or can be auto-ranged |
||
|
ILIM |
100mA,1mA, 10u, 100nA Full Scale Range (F.S.R.) |
0.1% F.S.R. | |||
|
IForce Mode |
IOUT |
10mA,1mA, 100uA,10uA,1uA, 100nA,10nA Full Scale Range (F.S.R.) |
0.1% F.S.R. |
Range is selectable or can be auto-ranged |
|
|
VMEAS |
+/- 100V, +/- 10V (F.S.R.) |
0.1% F.S.R. |
Range is auto-selected |
||
|
VLIM |
+/- 100V (F.S.R.) |
1% F.S.R. | |||
|
VOUT |
+/- 16V |
500mV |
ILim fixed at 100mA | ||
|
VSource 1-2 |
VMEAS |
+/- 16V |
1mA. |
OPERATION MODES
PWS has three opeating modes independently selectable for each SMU.
| DC: Bias conditions are asserted, measurement values are sampled after a settling time. Biases remain until re-programmed. (Settling time is automatically determined unless "Pulse" or "Servo" modes are used on other SMUs). | PULSE: 'Rest' and 'Pulse-To' values are seperately programmed. For each reading the 'Pulse-To' values are asserted for a programmed "Soak/ Servo" time, and measured values are sampled at the end of this time. Biases return to rest conditions. TSoak/Servo - 10 us to 100 ms | SERVO: 'Rest' values are seperately programmed. During the "Soak/Servo" interval the SMU is driven to achieve a programmed measurement condition on a seperate SMU (e.g. Gate voltage servoed to achieve a desired Drain current on a FET). |
MEASUREMENT MODES
PWS has three measurement modes.
| DISCRETE: Single measurement taken. Can use DC, PULSE or SERVO operating modes. | SWEEP: Measurement values taken over a programmed range. Can use DC, PULSE or SERVO operating modes. | STEPPED-SWEEP: Sweep is performed multiple times while bias conditions of a programmed value is stepped. Can use DC, PULSE or SERVO operating modes. |